| 摘要 |
A work device having: a first robot (20) provided so as to be movable in the X direction and the Y direction; a second robot (50) provided in a position in the Z direction that differs from that of the first robot (20), so as to be movable in the X direction and the Y direction; an inspection mark (61) provided in the work device (60) attached to the second robot (50); an imaging device (40) provided in the first robot (20); a first robot feed error detection means that detects first robot feed errors on the basis of reference marks captured by the imaging device (40); a relative position detection means that moves the first robot (20) and the second robot (50) to the inspection position, and detects relative position errors between the first robot (20) and the second robot (50) on the basis of the inspection marks (61) captured by the imaging device (40) at the detection position; and a second robot feed error detection means that detects second robot feed errors, on the basis of the first robot feed errors and the relative position errors. |
