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发明名称
Improvements in and relating to Ultra-High Vacuum Vapour Depositions Plants
摘要
申请公布号
GB1153510(A)
申请公布日期
1969.05.29
申请号
GB19670059052
申请日期
1967.12.29
申请人
BALZERS PATENT- UND BETEILIGUNGS-AKTIENGESELLSCHAFT
发明人
分类号
C23C14/56
主分类号
C23C14/56
代理机构
代理人
主权项
地址
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