| 摘要 |
The device (10) has a combination of a piezo-electrically actuated control valve (32) and two magnetically actuated control valves (22,23) for pressure- or mass flow control of the fluid. The control valves are lined with each other and with a line input (11) such that in a normal operation, the pressure and the mass flow of the fluid is adjusted by the former control valve and a connection or isolation of the former control valve with or from the line input is produced by the latter control valves. The pressure and the mass flow of the fluid are adjusted by the latter regulating valves in an emergency operation. |
