发明名称 |
Method and apparatus for in situ testing of gas flow controllers |
摘要 |
Methods and apparatus utilize a rate of drop in pressure upstream of a gas flow controller (GFC) to accurately measure a rate of flow through the GFC. Measurement of the gas flow through the many gas flow controllers in production use today is enabled, without requiring any special or sophisticated pressure regulators or other special components. Various provisions ensure that none of the changes in pressure that occur during or after the measurement perturb the constant flow of gas through the GFC under test. |
申请公布号 |
US8667830(B2) |
申请公布日期 |
2014.03.11 |
申请号 |
US20100891714 |
申请日期 |
2010.09.27 |
申请人 |
MONKOWSKI JOSEPH R.;CHEN JIALING;DING TAO;CHALMERS JAMES MACALLEN;PIVOTAL SYSTEMS CORPORATION |
发明人 |
MONKOWSKI JOSEPH R.;CHEN JIALING;DING TAO;CHALMERS JAMES MACALLEN |
分类号 |
G01P21/00 |
主分类号 |
G01P21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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