A DEVICE AND METHOD FOR ADJUSTING HEIGHT OF FLOATING-TYPE SUBSTRATE TRANSFERRING DEVICE, AND FLOATING-TYPE SUBSTRATE TRANSFERRING DEVICE AND COATING APPARATUS HAVING THE SAME

摘要

Disclosed are a device and a method for controlling the height of a floatable substrate transferring device, and a floatable substrate transferring device and a coating device having the device for controlling the height of a floatable substrate transferring device. According to an embodiment of the present invention, the device for controlling the height of a floatable substrate transferring device comprises one or more pairs of height control members arranged in both sides of a substrate and mounted under one or more pairs of adsorption pads for mounting the substrate using a vacuum adsorption method. Each height control member comprises: an upper fixed block having an inclined surface; a lower movable block having an inclined surface in parallel to the inclined surface and arranged to be movable in a horizontal direction; a movable inclination guide fixed on the top of the lower movable block; a movable guide mounted on the bottom of the lower movable block; a guide rail on which the movable guide is mounted; and a driving member for moving the lower movable block.