发明名称 METHOD FOR MANUFACTURING PATTERN STRUCTURE
摘要 <p>A method for manufacturing a pattern structure includes the steps of forming a lift-off material on a base by an inkjet technique, forming a functional film on the base and the lift-off material by atomic layer deposition, and removing the lift-off material by a lift-off technique so as to form a pattern on the base from the functional film.</p>
申请公布号 KR20140030196(A) 申请公布日期 2014.03.11
申请号 KR20137030628 申请日期 2012.05.16
申请人 SUMITOMO CORPORATION 发明人 MIYAGAWA TAKASHI;MURAKAMI TETSUYA;OKAMOTO KIMIYASU
分类号 H01L21/027 主分类号 H01L21/027
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