| 摘要 |
A squareness measuring method using a laser interferometer according to one embodiment of the present invention comprises: a straightness measuring step for obtaining at least two measuring data sets by measuring the straightness of at least two shaft; an Abbe’s error removing step for obtaining at least two correction data sets by removing Abbe’s errors from the at least two measuring data sets; an inclination obtaining step for obtaining the inclinations of reference straight lines on a measuring coordinate after setting the reference straight lines on the two correction data sets, respectively; and a squareness calculating step for calculating squareness by comparing the inclinations on the at least two shafts. According to the embodiment of the present invention, the Abbe’s errors, which can be generated in the installation of an optical square, are removed from the measuring data sets measured by the laser interferometer to perform accurate measurement and to estimate accurate squareness throughout entire area from the section straightness measuring data sets of local sections without removing obstacles disrupting the movement of laser beams and installing fixed objects additionally. [Reference numerals] (AA) Measure x axis;(BB) Measure straightness;(CC) Remove Abbe's error;(DD) Calculate reference straight line (and straightness error);(EE) Extract data to x_i;(FF) Calculate angle difference;(GG,II) Calculate reference straight line;(HH) Optimal alignment;(JJ) Calculate squareness;(KK) Measure y axis |
