发明名称 Apparatus and method for power MOS transistor
摘要 A MOS transistor comprises a substrate, a first region formed over the substrate, a second region grown from the first region, a third region of formed in the second region, a first drain/source region formed in the third region, a first gate electrode formed in a first trench, a second drain/source region formed in the second region and on an opposite side of the first trench from the first drain/source region and a second trench coupled between the second drain/source region and the second region, wherein the second trench is of a same depth as the first trench.
申请公布号 US8669611(B2) 申请公布日期 2014.03.11
申请号 US201213546506 申请日期 2012.07.11
申请人 NG CHUN-WAI;CHOU HSUEH-LIANG;SU PO-CHIH;LIU RUEY-HSIN;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 NG CHUN-WAI;CHOU HSUEH-LIANG;SU PO-CHIH;LIU RUEY-HSIN
分类号 H01L29/66 主分类号 H01L29/66
代理机构 代理人
主权项
地址