PHOTOACID GENERATOR COMPOUND, POLYMER COMPRISING END GROUPS CONTAINING THE PHOTOACID GENERATOR COMPOUND, AND METHOD OF MAKING

摘要

The compound of the present invention is represented by chemical formula (I). In the chemical formula (I), Z is y-valent C1-20 organic group, A1 and A2 independently contain ester or non-containing, respectively, L is a hetero atom or a single bond, and X1 is a single bond, -O-, -S-, -C(=O)-O-, -O-C(=O)-, -O-C(=O)-O-, -C(=O)-NR-, -NR-C(=O)-, -NR-C(=O)-NR-, -S(=O)2-O-, -O-S(=O)2-O-, -NR-S(=O)2-, or -S(=O)2-NR.