| 摘要 |
<p>(Assignment) The present invention is aimed to provide an electrostatic chuck capable of improving the adhesion between an inner electrode layer and a ceramic dielectric substrate, and to improving the conductivity of the inner electrode layer. (Solution) An electrostatic chuck having: a first surface for loading the subject of disposal, and a second surface located on the opposite side of the first surface; a ceramic dielectric substrate, which is a multi-crystalline sintered body; an electrode layer which is sintered, as a single body, onto the ceramic dielectric substrate, and which is installed in between the first and the second surfaces of the ceramic dielectric substrate. The ceramic dielectric substrate has: a first dielectric layer in between the electrode layer and the first surface; and a second dielectric layer in between the electrode and the second surface. The electrode layer has a first portion which is conductive, and a second portion which is combined to the first and second dielectric layers. The mean particle size of the crystal included in the second portion is smaller than the mean particle size of the crystal included in the ceramic dielectric substrate.</p> |
