发明名称 APPARATUS FOR SINGLY HANDLING WAFERS
摘要 The present invention discloses a separate waver handling device for elevating and rotating wafers accommodated in a cassette for visual inspection, one by one. The separate waver handling device comprises a bed having a hole at a position where the cassette is positioned; and a wafer handling unit for elevating and rotating the wafers in the cassette through the hole one by one. The wafer handling unit comprises a wafer rotation part for rotating the wafers one by one and a twinaxis transmission part for moving the wafer rotation part in a vertical direction and a horizontal direction, which are the same as the directions in which the wafers are arranged, for selecting a single wafer by the horizontal directional movement of the wafer rotation part and elevating the selected single wafer by the vertical directional movement of the wafer rotation part.
申请公布号 KR101370561(B1) 申请公布日期 2014.03.06
申请号 KR20130142247 申请日期 2013.11.21
申请人 UNION TECH CO., LTD.;YANG, HUI DOO;HAN, KI JEONG 发明人 HAN, KI JEONG;YANG, HUI DOO;KO, KYOUNG DAM
分类号 H01L21/67;H01L21/66 主分类号 H01L21/67
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