发明名称 INORGANIC MULTILAYER STACK AND METHODS AND COMPOSITIONS RELATING THERETO
摘要 A multilayer stack is described. The multilayer stack includes: (i) one or more inorganic barrier layers for reducing transport of gas or vapor molecules therethrough; (ii) an inorganic reactive layer disposed adjacent to one or more of the inorganic barrier layers, and the reactive layer capable of reacting with the gas or the vapor molecules; and (iii) wherein, in an operational state of the multilayer stack, the vapor or the gas molecules that diffuse through one or more of the inorganic barrier layers react with the inorganic reactive layer, and thereby allow said multilayer stack to be substantially impervious to the gas or the vapor molecules.
申请公布号 US2014060648(A1) 申请公布日期 2014.03.06
申请号 US201213981317 申请日期 2012.01.27
申请人 PRASAD RAVI;HOLLARS DENNIS R.;VITRIFLEX ,INC. 发明人 PRASAD RAVI;HOLLARS DENNIS R.
分类号 H01L31/0203;C23C16/44;C25B9/08;G02F1/01;G02F1/1339;G02F1/167;H01L21/56;H01L23/00 主分类号 H01L31/0203
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