| 摘要 |
External force detection equipment according to the present disclosure includes a container, a supporting portion, one excitation electrode, another excitation electrode, an oscillation circuit, a movable electrode, a fixed electrode, a frequency information detecting unit, and a conductor. An oscillation loop is formed from the oscillation circuit to pass through the one excitation electrode, the other excitation electrode, the movable electrode, and the fixed electrode, and return to the oscillation circuit. The frequency information detected by the frequency information detecting unit is used for estimating an external force acting on the piezoelectric plate. |
