| 发明名称 |
OPTICALLY ABSORPTIVE MATERIAL FOR ALIGNMENT MARKS |
| 摘要 |
<p>Imprint lithography templates having alignment marks with highly absorptive material. The alignment marks are insensitive to the effects of liquid spreading and can provide stability and increase contrast to alignment system during liquid imprint filling of template features.</p> |
| 申请公布号 |
KR20140027281(A) |
申请公布日期 |
2014.03.06 |
| 申请号 |
KR20137030417 |
申请日期 |
2012.04.25 |
| 申请人 |
MOLECULAR IMPRINTS, INC. |
发明人 |
KHUSNATDINOV NIYAZ;SELINIDIS KOSTA;IMHOF JOSEPH MICHAEL;LABRAKE DWAYNE L. |
| 分类号 |
H01L21/027 |
主分类号 |
H01L21/027 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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