发明名称 |
METHOD OF FORMING A CYLINDRICAL SPUTTER TARGET ASSEMBLY |
摘要 |
In a method of forming a cylindrical sputter target assembly, comprising the steps of: (a) providing a cylindrical backing tube; (b) providing a cylindrical sputter target, the inner diameter of which is larger than the outer diameter of the backing tube; (c) arranging the sputter target about the backing tube; and (d) bonding the sputter target to the backing tube by providing a solder layer between the backing tube and the sputter target; In accordance with the invention step (d) comprises directionally solidifying the solder layer. |
申请公布号 |
EP2702186(A1) |
申请公布日期 |
2014.03.05 |
申请号 |
EP20110716927 |
申请日期 |
2011.04.29 |
申请人 |
PRAXAIR S.T. TECHNOLOGY, INC. |
发明人 |
WURCZINGER, DIETER;DANIEL, DAVID |
分类号 |
C23C14/34;B23K1/00;G01N29/11 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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