发明名称 PLASMAS AND METHODS OF USING THEM
摘要 Plasma devices and methods for using such plasma devices in analytical measurements are disclosed. In certain examples, a low flow plasma may be operative using a total argon gas flow of less than about five liters per minute, and in some embodiments, a plasma argon gas flow of less than about four liter per minute. In other examples, a plasma produced using inductive and capacitive coupling is disclosed.
申请公布号 EP1855833(A4) 申请公布日期 2014.03.05
申请号 EP20060737826 申请日期 2006.03.10
申请人 PERKINELMER, INC. 发明人 MORRISROE, PETER, J.
分类号 H05H1/30;B23K9/00;B23K10/02;G01J3/30;H01L21/00;H01L21/306;H01L21/336 主分类号 H05H1/30
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