INSPECTION METHOD OF APPARATUS FOR PROCESSING SUBSTRATE

摘要

In the present invention, a method of inspecting a substrate processing apparatus includes a process step of successively performing a first and a second process in one process chamber among process chambers; a step of allowing a user to down a corresponding chamber when a predetermined specific condition is generated in the process step; and a step of inspecting an inspection process by loading a test substrate into a downed process chamber. [Reference numerals] (AA) Start; (BB) Satisfy certain conditions; (CC) End; (S110) Process a process; (S120) Down a chamber; (S130) Determine whether an inspection is in progress or not (setting Y/N); (S140) Inspecting step