发明名称 ON-LINE MONITORING SYSTEM FOR ULTRAPURE WATER
摘要 The present invention relates to an on-line monitoring system for ultrapure water. More particularly, the present invention relates to an on-line monitoring system for ultrapure water capable of monitoring the contamination state of ultrapure water. According to the embodiment of the present invention, the on-line monitoring system for ultrapure water includes a sample injection part (200) which injects a sample; a concentration part (300) which attaches and detaches to/from an analysis object sample; and an analysis part (400) which analyzes the analysis object sample. [Reference numerals] (400) Analysis part; (AA) Ultrapure water; (BB) Carrier; (CC) Standard solution; (DD) Eluant; (EE) Sample
申请公布号 KR101368485(B1) 申请公布日期 2014.03.03
申请号 KR20120109405 申请日期 2012.09.28
申请人 WITHTECH INC. 发明人 YOO, SEOUNG KYO;LEE, EUNG SUN
分类号 H01L21/66 主分类号 H01L21/66
代理机构 代理人
主权项
地址