| 摘要 |
A clean stocker includes a storage rack storing an article, a load port holding a case and including a loading and unloading space to load and unload the article to and from the held case, a transferring apparatus including a holding space to hold the article and transfer the article between the holding space and the storage rack and between the holding space and the case held in the loading and unloading space, the holding space being kept clean, and a first shield closing the holding space and traveling together with the transferring apparatus. |
