| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray analyzing apparatus capable of accurate fluorescent X-ray analysis by utilizing deconvolution.SOLUTION: An X-ray analyzing apparatus that scans a sample S with an X-ray beam is provided with a two-dimensional X-ray detector 4 disposed behind a sample table (sample holder) 3 as viewed from the radiating side of the X-ray beam. The X-ray analyzing apparatus, in a state where the sample S is not mounted, brings the X-ray beam incident on the two-dimensional X-ray detector 4 and detects with the two-dimensional X-ray detector 4 the two-dimensional intensity distribution of the X-ray beam in a spot. Further, the X-ray analyzing apparatus scans the sample S with an X-ray beam to acquire the intensity distribution of fluorescent X-rays, and deconvolutes the intensity distribution of the fluorescent X-rays by utilizing the two-dimensional intensity distribution of the X-ray beam. As the two-dimensional intensity distribution of the X-ray beam required for deconvolution is acquired every time measuring is done, accurate analysis is made possible. |
