发明名称 METHOD OF MANUFACTURING TRANSISTOR, TRANSISTOR, ARRAY SUBSTRATE AND DISPLAY DEVICE
摘要 Embodiments of the present invention provide a method for manufacturing a transistor, a transistor, an array substrate and a display device. The method comprises: forming a first source/drain metal layer on a substrate; forming an insulating layer above the first source/drain metal layer; forming a gate metal layer on the insulating layer; forming a gate insulating layer on the gate metal layer; forming a semiconductor layer above the gate insulating layer; forming an etching blocking layer on the semiconductor layer; forming a second source/drain metal layer above the etching blocking layer; forming an insulating layer above the second source/drain metal layer.
申请公布号 US2014054701(A1) 申请公布日期 2014.02.27
申请号 US201213876630 申请日期 2012.11.28
申请人 BOE TECHNOLOGY GROUP., LTD.;BOE TECHNOLOGY GROUP CO., LTD. 发明人 JIANG CHUNSHENG
分类号 H01L27/088;H01L29/66 主分类号 H01L27/088
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