SIMPLIFIED PITCH DOUBLING PROCESS FLOW,申请号KR20087027277-传众专利搜索

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发明名称	SIMPLIFIED PITCH DOUBLING PROCESS FLOW
摘要
申请公布号	KR101368544(B1)	申请公布日期	2014.02.27
申请号	KR20087027277	申请日期	2007.05.14
申请人		发明人
分类号	H01L21/20;H01L21/308;H01L21/316	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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