| 摘要 |
PROBLEM TO BE SOLVED: To prevent a cylindrical sputtering target from being broken by easily and securely joining a cylindrical target material and a backing tube together, and also to improve use efficiency.SOLUTION: One end of a backing tube 40 is closed with a dummy plug 60 to form a sealing end 42, a joining material 30 in a fused state is held in a recessed joining material holding part 72 with a substantially circular transverse section which is provided in a joining material filling tool 70 and into which the backing tube can be inserted, and the backing tube 40 whose sealing end 42 faces down is inserted into a target material 20 placed on the joining material filling tool 72 while leaving a gap g, and then inserted into the joining material holding part 72 through the target material 20. Consequently, the joining material 30 in the fused state is extruded from the joining material holding part 72 to fill the gap g between an inner peripheral surface of the target material 20 and an outer peripheral surface of the backing tube 40. The joining material is hardened and then taken out of the joining material filling tool 70, and the dummy plug 60 is removed. |
