CHARGED PARTICLE BEAM DEVICE AND SAMPLE MOVING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a sample moving device which improves the drift amount measured immediately after a sample is introduced into a charged particle beam device.SOLUTION: A charged particle beam device includes: an O ring 4 which hermetically seals a mirror body 1 and a sample holder 2 of an electron microscope; a slider cylinder 30 which slides in a longitudinal direction of the sample holder 2 and positions the sample holder 2; a bellows 32 which hermetically holds the slider cylinder 30 and the mirror body 1; means 10 which drives the slider cylinder 30 in the longitudinal direction of the sample holder 2; a butt member 40 which positions the sample holder 2 in the longitudinal direction; and an elastic body 31 which connects the butt member 40 with the slider cylinder 30.