发明名称 ESTIMATING MATERIAL PROPERTIES USING SPECKLE STATISTICS
摘要 A surface roughness value and a sub-surface scattering property of a material are estimated. The material is illuminated with a light beam with controlled coherence properties at multiple incident angles. Multiple speckle patterns are recorded, each speckle pattern being recorded for a respective one of the multiple incident angles. Both of a surface roughness value and a sub-surface scattering property of the material are estimated by calculations using the multiple speckle patterns and the incident angle for each such speckle pattern.
申请公布号 US2014055792(A1) 申请公布日期 2014.02.27
申请号 US201213595058 申请日期 2012.08.27
申请人 TIN SIU-KEI;CANON KABUSHIKI KAISHA 发明人 TIN SIU-KEI
分类号 G01B11/30;G01N21/49 主分类号 G01B11/30
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