GROUP MANAGEMENT DEVICE, SUBSTRATE PROCESSING SYSTEM, AND FILE MANAGEMENT METHOD FOR SUBSTRATE PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To make it possible to suppress omission of acquiring a setting file and a relational file related to the setting file from a substrate processing device while reducing a burden of an operator.SOLUTION: A group management device accepts input of a predetermined setting file; reads a content of the predetermined setting file; acquires the predetermined setting file and one or more relational files related to the predetermined setting file from a substrate processing device; and creates a file group including the acquired setting file and the acquired relational files to store the file group so that as to be outputtable.