| 摘要 |
An ion source tube (300) for sustaining a plasma discharge therein. The ion source tube (300) comprises a slit opening (310) along a side of the ion source tube (300), wherein the slit opening (310) has a width less than 0.29 mm. The ion source tube (300) also comprises an end opening (314) in an end of the ion source tube (300). The end opening (314) is smaller than an inner diameter of the ion source tube (300) and is displaced by 0-1.5 mm from a central axis (316) of the ion source tube (300) toward the slit opening (310). The plasma column is displaced 0.2 to 0.5 mm relative the slit opening (310). The ion source tube (300) comprises a cavity (312) that accommodates the plasma discharge. The invention also relates to a method for making an ion source tube (300). |
