| 摘要 |
PROBLEM TO BE SOLVED: To provide a solid electrolytic capacitor superior in transient response, in which deterioration factors for equivalent series resistance and an equivalent series inductance are removed, and to provide a method for manufacturing the capacitor. SOLUTION: In a substrate forming step, a hole for passing an electrode portion therethrough is formed on a substrate 1, made of an insulator such as silicon. In an electrode portion forming step, a good conductor is embedded in the through-hole 1a of the substrate 1 to form anode and cathode electrode portions 2. In an insulation processing step, an insulating coating 3 is formed on a portion protruding from the upper surface portion of the substrate 1 of the cathode electrode portion 2. In an element portion forming step, a capacitor element portion 4 is formed on the upper surface portion of the substrate 1. In a cathode lead-out step, a cathode lead-out layer 5 is formed on the tip of the shaft portion of the cathode electrode and the surface of the capacitor element portion. In a packaging step, the upper surface and outer circumferential portion of the cathode lead-out portion 5 and the outer circumferential portion of the solid electrolytic layer 4 are packaged with a mold resin 6, or the like. COPYRIGHT: (C)2011,JPO&INPIT |
