发明名称 SYSTEMS AND METHODS FOR MANAGING MATERIAL STORAGE VESSELS HAVING INFORMATION STORAGE ELEMENTS
摘要 <p>Material management systems and methods include material storage vessels with information (e.g., electronic information) storage. Information may be communicated from a storage device to a process tool controller and employed to set or adjust a process tool operating parameter. Material information may be determined by remote analysis and subsequently communicated to an electronic information storage device of a vessel containing such material. Location and movement of material storage vessels within a customer facility may be automatically tracked, with further transfer of material-specific information. Product information may be associatively stored with material-specific information utilized in product manufacture.</p>
申请公布号 KR20140023430(A) 申请公布日期 2014.02.26
申请号 KR20147001044 申请日期 2007.07.10
申请人 ADVANCED TECHNOLOGY MATERIALS INC. 发明人 ELFSTROM SCOTT;HANSON KATHLEEN L.;HAUMERSEN STEVEN E.;JOHNSON THOMAS D.;NOLET CLARI;SMEATON WILLIAM
分类号 G06F19/00;G07C1/00;G07C11/00;H01L21/00 主分类号 G06F19/00
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