发明名称 |
SYSTEMS AND METHODS FOR MANAGING MATERIAL STORAGE VESSELS HAVING INFORMATION STORAGE ELEMENTS |
摘要 |
<p>Material management systems and methods include material storage vessels with information (e.g., electronic information) storage. Information may be communicated from a storage device to a process tool controller and employed to set or adjust a process tool operating parameter. Material information may be determined by remote analysis and subsequently communicated to an electronic information storage device of a vessel containing such material. Location and movement of material storage vessels within a customer facility may be automatically tracked, with further transfer of material-specific information. Product information may be associatively stored with material-specific information utilized in product manufacture.</p> |
申请公布号 |
KR20140023430(A) |
申请公布日期 |
2014.02.26 |
申请号 |
KR20147001044 |
申请日期 |
2007.07.10 |
申请人 |
ADVANCED TECHNOLOGY MATERIALS INC. |
发明人 |
ELFSTROM SCOTT;HANSON KATHLEEN L.;HAUMERSEN STEVEN E.;JOHNSON THOMAS D.;NOLET CLARI;SMEATON WILLIAM |
分类号 |
G06F19/00;G07C1/00;G07C11/00;H01L21/00 |
主分类号 |
G06F19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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