| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a scheduling method for a substrate processing apparatus that can improve processing efficiency by performing overtaking arrangement of a lot. <P>SOLUTION: Respective blocks are arranged from planning start positions PSP1 to PSP3 according to a recipe. When there is a standby time from a block B which uses a substrate standby section CWS to a next block C, an adjusted planning start position MSP2 is found by shifting the planning start position PSP2 of a second lot backward with respect to time. A control unit starts arranging the blocks in the order of temporally earlier lots at the planning start positions PSP1 and PSP3 including the adjusted planning start position MSP2. Consequently, overtaking is performed in which a third lot employing a recipe for performing short-time processing without changing the planning start position PSP3 is scheduled to be arranged temporally before the second lot at the adjusted planning start position MSP2, thereby improving the processing efficiency of the substrate processing apparatus. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
