发明名称 Method for manufacturing active array substrate
摘要 A method for manufacturing an active array substrate is provided herein. The active array substrate can be manufactured by using only two photolithography process steps. The photolithography process step using a first photomask may be provided for forming a drain electrode, a source electrode, a data line and/or a data line connecting pad and a patterned transparent conductive layer, etc. The photolithography process step using a second photomask may be utilized for forming a gate electrode, a gate line, a gate insulating layer, a channel layer and/or a gate line connecting pad, and so forth.
申请公布号 US8658480(B2) 申请公布日期 2014.02.25
申请号 US201213615626 申请日期 2012.09.14
申请人 TANG WEN-CHUNG;SHU FANG-AN;TSAI YAO-CHOU;SHINN TED-HONG;E INK HOLDINGS INC. 发明人 TANG WEN-CHUNG;SHU FANG-AN;TSAI YAO-CHOU;SHINN TED-HONG
分类号 H01L21/00 主分类号 H01L21/00
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