| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem such that a plasmonic lens is adhered on a substrate and so a degree of freedom of a pattern is small.SOLUTION: The exposure device for exposing an exposed member comprises: a light output part for outputting light; a reticle on which a pattern for radiating the light is formed; a lens member to which the light passing through the reticle is radiated and on which plural plasmonic lenses for outputting a pattern of a near-field light obtained by reducing the pattern are aligned; and a first driving part for driving, in a first driving direction, at least one of the reticle, the lens member and the exposed member to the other member. |
