| 摘要 |
PROBLEM TO BE SOLVED: To efficiently measure the optical characteristics of an inspected optical system on the basis of an interference fringe obtained using a diffraction grating, without complicating a measurement mechanism.SOLUTION: In a measurement method for determining the optical characteristics of a projection optical system PO, an interference fringe 22Y is formed by passing the light emitted from a pinhole array 6 of a reticle 4 for measurement, illuminated by an illumination system of an exposure device, to the projection optical system PO and a diffraction grating 10Y. Distribution of modulation degree of the interference fringe 22Y is determined, and the shape of a pupil image conjugate with an emission pupil of the projection optical system PO is determined based on the distribution of modulation degree. |
