发明名称 TRANSFER MECHANISM OF WORKPIECE AND VACUUM PROCESSING APPARATUS
摘要 PROBLEM TO BE SOLVED: To achieve space saving with a simple structure.SOLUTION: A first conveyance path 20A and a second conveyance path 20B are formed of a first transport shaft 21A driving in the forward path, and a second transport shaft 21B driving in the return path, having drive rollers 22A, 22B that can be driven by being connected with a drive source, and support rollers 23A, 23B arranged coaxially and capable of taking different rotational state.
申请公布号 JP2014036159(A) 申请公布日期 2014.02.24
申请号 JP20120177394 申请日期 2012.08.09
申请人 ULVAC JAPAN LTD 发明人 HAYASAKA TOMOHIRO;TAKAHASHI YASUSHI;KIYOKAWA TARO;YAHAGI WATARU
分类号 H01L21/677;B65G13/02;B65G47/52;B65G49/06 主分类号 H01L21/677
代理机构 代理人
主权项
地址