| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric element and a piezoelectric device manufactured stably and having excellent piezoelectric characteristics by controlling the local structure (bonding state of atom) of a piezoelectric layer with high accuracy.SOLUTION: In a piezoelectric element 10 where at least a lower electrode layer 3, a piezoelectric layer 4 represented by a general formula (NaKLi)NbO(0<x≤1, 0<y≤1, 0≤Z≤0.2, x+y+z=1), and an upper electrode layer 5 are laminated on a substrate 1, the piezoelectric layer 4 has a crystal structure of pseudo-cubic, tetragonal, prismatic crystal, monoclinic crystal, or rhombohedral crystal, or a state where the crystal structures mentioned above coexist. The difference between a maximum value and a minimum value of energy at the Na-K absorption end of the piezoelectric layer 4 in the film thickness direction, measured by electron energy loss spectrometry or X-ray absorption fine structure analysis, is 0.8 eV or less. |
