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发明名称
测量设备、曝光设备,以及装置制造方法
摘要
本发明提供一种测量测试表面高度之测量设备,该设备包含:影像感测装置,其包含复数个侦测单元,配置成侦测来自测试表面之测量光及来自参考表面之参考光所形成之干涉光;以及光学系统,配置成导引测量光及参考光至复数个侦测单元,其中该参考表面安置成在分别进入复数个侦测单元之测量光束及参考光束间的光路差中产生差异。
申请公布号
TWI427433
申请公布日期
2014.02.21
申请号
TW099125098
申请日期
2010.07.29
申请人
佳能股份有限公司 日本
发明人
佐佐木亮
分类号
G03F7/20;H01L21/027
主分类号
G03F7/20
代理机构
代理人
林志刚 台北市中山区南京东路2段125号7楼
主权项
地址
日本
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