| 摘要 |
PURPOSE: A boat transferring system is provided to reduce manufacturing costs by simplifying a structure of a transfer frame composed of a top frame and a bottom frame. CONSTITUTION: A body(110) includes a cylindrical outer body(111) and an inner body(115). A door is rotatably installed on one side of the body and opens or closes a chamber(110a). A substrate is loaded on a boat(210) and is erectly installed. A transfer frame(310) loads the boat on the chamber or unloads the boat from the chamber. The transfer frame includes a bottom frame and a top frame(315) which is laminated on the upper side of the bottom frame. |
