| 摘要 |
PROBLEM TO BE SOLVED: To provide a target supply method capable of outputting a target material appropriately.SOLUTION: The target supply method includes a step for using a pressure controller including a target generator having a nozzle, a pressure controller having a pressure sensor and an actuator, and a target supplier having an electrode, a potential application section and a timer, and raising the pressure in the target generator to a set pressure by means of the actuator, a step for applying different potentials to the electrode and a target material from the potential application section, when detecting the fact that it is on the way to raise the pressure in the target generator to a set pressure, and a step for applying a constant first potential to the target material from the potential application section, and applying a first pulse voltage to the electrode so as to extract the target material by an electrostatic force, when detecting the fact that the pressure in the target generator has raised to the set pressure. |
