| 摘要 |
PROBLEM TO BE SOLVED: To provide a Bernoulli chuck which is one of non contact holding transfer devices of a thin plate like workpiece and includes a movable stopper having a new structure for preventing the workpiece from moving in a direction parallel to a suction surface.SOLUTION: A Bernoulli chuck 1 according to this invention includes: a suction holding plate 20 having a suction surface 22 in which a jet hole of a gas supplied from a high pressure gas source is formed; and a movable stopper 5 which may protrude or retract relative to the suction surface 22. The movable stopper 5 includes a long member which may curve and is placed in a recessed part 37 provided on the suction surface 22. When a compression force is applied to the movable stopper 5 in a longitudinal direction, the movable stopper 5 buckles. Then, a portion of the movable stopper 5 which is placed in the recessed part 37 curves and the curved portion protrudes from the suction surface 22. |
