发明名称 IGNITION APPARATUS FOR ARC SOURCES
摘要 The present invention relates to an ignition device for igniting a high-current discharge of an electrical arc evaporator in a vacuum coating system. Ignition is performed by means of mechanically closing and opening a contact between the cathode and the anode. Contact is established by means of an ignition finger that can move on a forced path. On account of the forced path, the ignition finger can be moved by means of a simple mechanical drive to a park position, which is protected against coating, and said ignition finger can also be used to ignite a second target.
申请公布号 US2014048209(A1) 申请公布日期 2014.02.20
申请号 US201313963128 申请日期 2013.08.09
申请人 OERLIKON TRADING AG, TRUBBACH 发明人 KRASSNITZER SIEGFRIED;GSTOEHL OLIVER;HAGMANN JUERG
分类号 H01J37/32;C23F1/08 主分类号 H01J37/32
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