| 摘要 |
The present invention relates to a nanocarbon fiber (NCF) heating system for preventing harmful gases from sticking on the inner surface of a pipe for semiconductor manufacturing equipment comprising semiconductor manufacturing equipment; a pipe connected to the semiconductor manufacturing equipment; and an NCF heating unit for partially covering the pipe. By this, the present invention improves the mechanical properties, thermal properties, and durability of an NFC heating unit by applying NFC having thermal conductivity 200 times higher than steel and 100 times higher than copper; and enables users to accurately control temperatures by directly monitoring the temperature of a pipe as a heating object. |
