| 摘要 |
PROBLEM TO BE SOLVED: To provide a guide plate for a probe card which can be provided with minute open holes at narrow pitch intervals and can be enhanced for its strength.SOLUTION: A guide plate 100 for a probe card comprises a metal base 110, first insulating layers 120, and metal layers 130. The metal base 110 comprises a plurality of open holes 111 through which probes can be inserted, and internal wall surfaces of the open holes 111. The first insulating layers 120 are provided on the internal wall surfaces of the open holes 111 in the metal base 110 and form cylindrical shapes. The metal layers 130 are provided on the first insulating layers 120. |
