| 摘要 |
PROBLEM TO BE SOLVED: To provide a more generalized and simple method for setting an inspection area, which allows accurate inspecting work for inspecting a pattern formed object arranged on a plane while suppressing the deviation of a pattern to be inspected from the inspection area in apparatus design, due to inaccuracy of establishing a planar substrate to a prescribed position.SOLUTION: By acquiring brightness information from an imaging camera over the whole effective area including a pattern, a plurality of inspection basic areas which are ranked in accordance with the brightness ranges are set based on the distribution of the obtained brightness information, and the plurality of inspection areas to be inspected are formed by guiding from respective inspection basic areas. |
