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发明名称
Process for fabricating a semiconductor device
摘要
申请公布号
EP1126518(A3)
申请公布日期
2003.01.22
申请号
EP20010103238
申请日期
2001.02.12
申请人
SONY CORPORATION
发明人
KOMAI, NAOKI;SEGAWA, YUJI;NOGAMI, TAKESHI
分类号
H01L21/3205;C23C18/16;H01L21/288;H01L21/768;H01L23/52;(IPC1-7):H01L21/768;H01L23/532
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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