| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow rate controller that solves the problem that it is difficult to downsize the flow rate controller and to improve package density because the size of a substrate block is standardized.SOLUTION: A flow rate controller includes: a substrate block 1 in which a single input port 1d for flowing a fluid therein, a single output port 1e for emitting the fluid therefrom, two inflow passages 1a(1) having base ends connected to the input port 1d, and two outflow passages 1a(4) having terminals connected to the output port 1e are formed; and two flow rate control units UT disposed on the substrate block 1. One of the flow rate control units UT is disposed between one of the inflow passages 1a(1) and one of the outflow passages 1a(4). The other of the flow rate control units UT is disposed between the other of the inflow passages 1a(1) and the other of the outflow passages 1a(4). Each flow rate control unit UT can operate independently. |
