发明名称 |
PROCESS FOR PLASMA TREATMENT EMPLOYING CERAMIC-FILLED POLYMER COMPOSITE PARTS |
摘要 |
Internal components of plasma reactors are composed of a toleratable, ceramic filled plasma-useful polymer such as a high temperature engineering thermoplastic, preferably a polyamideimide or polybenzimidazole. The parts exhibit a low erosion rate upon exposure to plasma at low pressure. |
申请公布号 |
EP2697816(A1) |
申请公布日期 |
2014.02.19 |
申请号 |
EP20120717241 |
申请日期 |
2012.04.10 |
申请人 |
QUADRANT EPP AG |
发明人 |
WILLIAMS, SCOTT, HOWARD;CAMPBELL, RICHARD, WILLIAM;GLANDER, STEPHAN |
分类号 |
H01J37/32 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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