| 摘要 |
The present invention relates to a manufacturing apparatus of gas-phase hollow nanoparticle including a shell material precursor generator and a hollow particle reactor at room temperature and atmospheric pressure by using electron beam irradiation and a method thereof. The apparatus comprises a shell material precursor generator generating a shell material precursor by functioning fluid at room temperature and atmospheric pressure; a hollow particle reactor which forms hollow nanoparticles from the shell material precursor and a template material; a nanoparticle collector collecting the hollow nanoparticles from the hollow particle reactor; and an electron beam irradiator irradiating the hollow particle reactor with electron beam. The template material is nonmetallic in structure. By using the apparatus and the method, template nanoparticle are formed in the template material generator by the functioning fluid at room temperature and atmospheric pressure, and the steam of the shell material precursor is formed in the shell material precursor generator by the functioning fluid so that devices for high pressure are not necessary, thereby simplifying the manufacturing apparatus and saving production cost. [Reference numerals] (32) Hollow particle reactor; (40) Nanoparticle collector; (AA) Electron beam irradiator; (BB,DD) Functioning fluid; (CC) Carrier gas |
