| 摘要 |
A wafer pod gas charging apparatus includes a machine, on which different types of nozzles are introduced. One type of the nozzles is designed to have an inner tube elastically movable in an outer sleeve. When a wafer pod having gas ports of a specific depth is placed on the machine for charging gas, the exact type of the wafer pod can be detected by a sensor unit on the machine and the gas ports of the wafer pod can properly engage with one matching type of the nozzles on the machine to enable the gas charging. Therefore, by changing the structural designs of the nozzles on the machine, the same one machine is adapted to charge gas into different types of wafer pods at reduced cost. |
