发明名称 SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 A semiconductor memory device includes a memory cell block formed over a first memory cell region and a second memory cell region defined on a semiconductor substrate, and a voltage supply circuit configured to apply an operating voltage to gate lines of a plurality of memory cells included in the memory cell block, wherein a first air gap disposed between the gate lines in the first memory cell region has a smaller size than a second air gap disposed between the gate lines in the second memory cell region.
申请公布号 US2014043905(A1) 申请公布日期 2014.02.13
申请号 US201213605243 申请日期 2012.09.06
申请人 LEE MYUNG SHIK 发明人 LEE MYUNG SHIK
分类号 H01L21/28;G11C16/04 主分类号 H01L21/28
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