APPARATUS FOR PRODUCING GRANULAR POLYCRYSTALLINE SILICON

摘要

The present invention relates to an apparatus for producing granular polycrystalline silicon. More specifically, the present invention relates to an apparatus for producing granular polycrystalline silicon capable of realizing a complete continuous process without generating precipitate on the inner wall of a reactor. The flow layer of seed particles is formed under high pressure. A reaction gas is supplied to precipitate metal silicon on the seed particles. A previously-selected high purity granular polycrystalline silicon with a constant size is manufactured.